Selective Etching of (Ba,Sr)TiO3 Thin Films Over Silicon in an Inductively Coupled Plasma

Oct 2, 2016

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Selective Etching of (Ba,Sr)TiO3 Thin Films Over Silicon in an Inductively Coupled Plasma

Selective etching of (Ba,Sr)TiO₃ thin films over silicon in an inductively coupled plasma.

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Selective Etching of (Ba,Sr)TiO3 Thin Films Over Silicon in an Inductively Coupled Plasma

Selective Etching of (Ba,Sr)TiO3 Thin Films Over Silicon in an Inductively Coupled Plasma

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