Surface loss coefficients of CFx and F radicals on stainless steel

File Size70.65 KB
Create Date25th August 2016

The surface loss coefficients of CFx (x51 – 3) and F radicals have been measured on the stainless steel walls of the differential pumping systems of a plasma reactor. This measurement is made by comparing the beam to background signal ratio of the radicals measured by appearance potential mass spectrometry.