Surface loss coefficients of CFx and F radicals on stainless steel

Aug 25, 2016

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Surface loss coefficients of CFx and F radicals on stainless steel

The surface loss coefficients of CFx (x51 – 3) and F radicals have been measured on the stainless steel walls of the differential pumping systems of a plasma reactor. This measurement is made by comparing the beam to background signal ratio of the radicals measured by appearance potential mass spectrometry.

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Surface loss coefficients of CFx and F radicals on stainless steel

Surface loss coefficients of CFx and F radicals on stainless steel

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