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Threshold ionization mass spectrometry study of singlet molecular oxygen in the...

Threshold ionization mass spectrometry (TIMS) has been used to measure the excited molecular oxygen states O2 (1g) and O2 (1+g ) during plasma-assisted chemical vapour deposition of tin oxide (SnO2) thin films. The latter, composed of nanosized features, was deposited by feeding in a mixture of Ar, O2 and tetramethyltin (Sn(CH3)4 or TMT) in a capacitively coupled RF discharge reactor.