Threshold ionization mass spectrometry study of singlet molecular oxygen in the…


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Threshold ionization mass spectrometry (TIMS) has been used to measure the excited molecular oxygen states O2 (1g) and O2 (1+g ) during plasma-assisted chemical vapour deposition of tin oxide (SnO2) thin films. The latter, composed of nanosized features, was deposited by feeding in a mixture of Ar, O2 and tetramethyltin (Sn(CH3)4 or TMT) in a capacitively coupled RF discharge reactor.