fbpx
Select Page
[featured_image]
Download
Download is available until [expire_date]
  • Version
  • Download 7
  • File Size 56.00 KB
  • File Count 1
  • Create Date January 10, 2022
  • Last Updated January 22, 2024

Time-averaged and time-resolved ion fluxes related to reactive HiPIMS deposition of Ti-Al-N films

Time-averaged and time-resolved ion fluxes related to reactive HiPIMS deposition of Ti-Al-N films