Time-averaged and time-resolved ion fluxes related to reactive HiPIMS deposition of Ti-Al-N films

Jan 10, 2022

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Time-averaged and time-resolved ion fluxes related to reactive HiPIMS deposition of Ti-Al-N films

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Time-averaged and time-resolved ion fluxes related to reactive HiPIMS deposition of Ti-Al-N films

Time-averaged and time-resolved ion fluxes related to reactive HiPIMS deposition of Ti-Al-N films

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