Vacuum Process Gas Analyser


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File Size2.48 MB
Create Date4th October 2016
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The compact Hiden HPR-30 differentially-pumped mass spectrometer enables real-time measurement and control of gas composition in vacuum processes in the pressure regime 1mbar to 10E-4mbar, addressing multiple process areas including vacuum coating, plasma etching, sputter deposition, CVD/MOCVD and RIE...