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ALD Atomic Layer Deposition –

Vacuum Processing of Thin Films

Compact SIMS


Nanoscale Surface Analysis for ALD Films.

Compact SIMS

EQP Series

Rapid acquisition mass and energy analysis for plasma-assisted ALD.

Compact SIMS

HPR-30 Series

Precise process gas analysis across a wide sampling pressure range.

Compact SIMS


Reliable vacuum process analysis and RGA in high-pressure environments.

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