Our Installation Engineer, Andrea Secco – Applications Specialist, has been working at the Nanofabrication Core Lab at KAUST to install a HPR-30 System.
Nabeel Aslam and John Bruce (pictured below) will be using the instrument for monitoring of their monitor the ALD (atomic layer deposition) processes.
One of the key uses is for verification of the chamber after inert gas flushing process, to ensure successful cleaning between use of different precursors.
The below data shows an experiment carried out using the HPR-30 system using trimethylaluminium (TMA) as precursor and clearly shows the cycles of the injections of TMA alternated with Oxygen plasma.
Visit their website: Nanofabrication Core Labs, KAUST
