RGA Series

Systems for the examination of components present in a vessel or evolved from a process

All Hiden residual gas analysers are application tested and calibrated to provide the highest quality performance, and they are backed by a 3 year warranty and lifetime service support.

RGA Series - Systems for the examination of components present in a vessel or evolved from a process


The Hiden RGA Series includes three specification levels :

HALO RGA  – for residual gas analysis
Suitable for vacuum fingerprint analysis, leak detection and trend analysis

3F Series RGA – triple filter mass spectrometers for analytical applications
Triple filter technology provides extended mass ranges, increased mass resolution, enhanced sensitivity and improved contamination resistance for more demanding analytical applications.

3F-PIC – pulse ion counting detection for fast event studies

Ultra-fast pulse ion counting detection provides seven decade continuous dynamic range with optimum sensitivity at UHV/XHV


  • Mass range options: 50, 100, 200, 300, or 510 amu.
  • Detector options give sensitivity for high vacuum to ultra high vacuum, UHV.
  • Stability (less than ±0.5% height variation over 24 h)
  • MASsoft control via RS232, USB or multiple systems via Ethernet LAN
  • Fast access for Histogram, Trend Analysis and Analog peak displays
  • Mixed mode scanning e.g. Trend, Histogram and Analog peaks in multiple-windows
  • Simultaneous real time display of graphical and tabular trend analysis data
  • Cursor for peak height identification under mouse control
  • Real time background subtract, Automatic mass scale alignment
  • Data export facility to ASCII format and to all Windows devices
  • netMASsoft, an on board web server for RGA operation from your Web browser






Residual Gas Analysis for vacuum quality monitoring at UHV on beam lines and synchrotron rings: BNL Logo

Installation example at Brookhaven National lab
NSLS-II: One of the world’s most advanced synchrotrons



The system is supplied with MASsoft Professional software.

This Windows 8 and Windows 10 compatible software allows control of the instrument via USB 2.0, RS232 or Ethernet. Provides comprehensive I/O for data output and for reading data from external devices for integration and display with mass spectrometer data.