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3F Series / 1000 Series RGA

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A residual gas analysis

system for high precision

scientific and process

applications

The HAL 3F RC systems are designed for gas analysis in high precision scientific and process applications.

Applications

Overview

The HAL 3F RC systems are designed for gas analysis in high precision scientific and process applications.

The triple filter quadrupole minimises contamination from unwanted ions, where the pre and post RF only filters work at different selected frequency from that of the main mass filter. In combination with the longer mass filter and wider rod diameter of 9 mm, this results in increased mass resolution, ion sensitivity, stability for precision/ratio measurements and high mass transmission.

Features

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