Effect of varying N2 pressure on DC arc plasma properties and
microstructure of TiAlN coatings
Plasma Sources Science and Technology 2020, 29, 095015 (10pp) doi:https://doi.org/10.1088/1361-6595/abaeb4
The effect of nitrogen pressure on both the plasma composition and ion energy is investigated using the Hiden EQP system. The resultant microstructural changes in the TiAlN coatings were measured using electron microscopy and x-ray diffraction. The increase in nitrogen pressure and subsequent rise in inelastic collisions in the plasma, promoted a plasma with increased neutral species concentration, leading to increased surface roughness and change in surface crystalline structure in the resultant TiAlN surface.
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