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Plasma Diagnostics

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Quadrupole Mass Spectrometry characterization of low pressure microwave plasmas for atomic species production. 1.57 MB 35 downloads

Quadrupole Mass Spectrometry characterization of low pressure microwave plasmas for...
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Film growth precursors in a remote SiH4 plasma used for high-rate deposition of hydrogenated amorphous silicon. 180.12 KB 14 downloads

Film growth precursors in a remote SiH4 plasma used for high-rate deposition of hydrogenated...
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Control of dissociation by varying oxygen pressure in noble gas admixtures for plasma processing. 117.65 KB 17 downloads

Control of dissociation by varying oxygen pressure in noble gas admixtures for plasma...
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High-energy ions and atoms sputtered and reflected from a magnetron source for deposition of magnetic thin films. 158.99 KB 37 downloads

High-energy ions and atoms sputtered and reflected from a magnetron source for deposition...