Plasma Diagnostics
Quadrupole Mass Spectrometry characterization of low pressure microwave plasmas for atomic species production. 1.57 MB 31 downloads
Quadrupole Mass Spectrometry characterization of low pressure microwave plasmas for...Film growth precursors in a remote SiH4 plasma used for high-rate deposition of hydrogenated amorphous silicon. 180.12 KB 12 downloads
Film growth precursors in a remote SiH4 plasma used for high-rate deposition of hydrogenated...Control of dissociation by varying oxygen pressure in noble gas admixtures for plasma processing. 117.65 KB 15 downloads
Control of dissociation by varying oxygen pressure in noble gas admixtures for plasma...High-energy ions and atoms sputtered and reflected from a magnetron source for deposition of magnetic thin films. 158.99 KB 30 downloads
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