Plasma Diagnostics

Refined Appearance Potential Mass Spectrometry for High Precision Radical Density Quantification in Plasma 4 MB 11 downloads

Refined Appearance Potential Mass Spectrometry for High Precision Radical Density...

Threshold ionization mass spectrometry study of singlet molecular oxygen in the... 483.91 KB 43 downloads

Threshold ionization mass spectrometry (TIMS) has been used to measure the excited...

Threshold Ionization Mass Spectrometry of Reactive Species in Remote Ar/C2H2 Expanding... 196.98 KB 38 downloads

Threshold ionization mass spectrometry of reactive species in remote Ar/C2H2expanding...

Surface loss coefficients of CFx and F radicals on stainless steel 70.65 KB 33 downloads

The surface loss coefficients of CFx (x51 – 3) and F radicals have been measured...

Study on polymeric neutral species in high-density fluorocarbon plasmas. 345.86 KB 33 downloads

Study on polymeric neutral species in high-density fluorocarbon plasmas. ...

Radical density measurement at low pressure discharge denitrification by appearance mass spectrometry 1.46 MB 37 downloads

In discharge dentrification, radical production by electron collision with combustion...

Quantification of a Radical Beam Source for Methyl Radicals 90.32 KB 33 downloads

A radical beam source for methyl radicals (CH3) was characterized applying ionization-threshold...

Plasma diagnostic study of silicon nitride film growth in a remote Ar–H2–N2–SiH4 plasma: Role of N and SiHn radicals. 341.76 KB 29 downloads

Plasma diagnostic study of silicon nitride film growth in a remote Ar–H2–N2–SiH4...

Near-surface generation of negative ions in low-pressure discharges 117.60 KB 26 downloads

Near-surface generation of negative ions in low-pressure discharges ...

Measurement of absolute radical densities in plasma using modulated-beam line-of-sight TIMS 286.82 KB 34 downloads

Measurement of absolute radical densities in plasma using modulated-beam line-of-sight...