Plasma Diagnostics
Refined Appearance Potential Mass Spectrometry for High Precision Radical Density Quantification in Plasma 4 MB 9 downloads
Refined Appearance Potential Mass Spectrometry for High Precision Radical Density...
Threshold ionization mass spectrometry study of singlet molecular oxygen in the... 483.91 KB 40 downloads
Threshold ionization mass spectrometry (TIMS) has been used to measure the excited...
Threshold Ionization Mass Spectrometry of Reactive Species in Remote Ar/C2H2 Expanding... 196.98 KB 36 downloads
Threshold ionization mass spectrometry of reactive species in remote Ar/C2H2expanding...
Surface loss coefficients of CFx and F radicals on stainless steel 70.65 KB 31 downloads
The surface loss coefficients of CFx (x51 – 3) and F radicals have been measured...
Study on polymeric neutral species in high-density fluorocarbon plasmas. 345.86 KB 31 downloads
Study on polymeric neutral species in high-density fluorocarbon plasmas. ...
Radical density measurement at low pressure discharge denitrification by appearance mass spectrometry 1.46 MB 35 downloads
In discharge dentrification, radical production by electron collision with combustion...
Quantification of a Radical Beam Source for Methyl Radicals 90.32 KB 31 downloads
A radical beam source for methyl radicals (CH3) was characterized applying ionization-threshold...
Plasma diagnostic study of silicon nitride film growth in a remote Ar–H2–N2–SiH4 plasma: Role of N and SiHn radicals. 341.76 KB 27 downloads
Plasma diagnostic study of silicon nitride film growth in a remote Ar–H2–N2–SiH4...
Near-surface generation of negative ions in low-pressure discharges 117.60 KB 24 downloads
Near-surface generation of negative ions in low-pressure discharges ...
Measurement of absolute radical densities in plasma using modulated-beam line-of-sight TIMS 286.82 KB 31 downloads
Measurement of absolute radical densities in plasma using modulated-beam line-of-sight...- 1
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