Threshold ionization mass spectrometry (TIMS) has been used to measure the excited molecular oxygen states O2 (1g) and O2 (1+g ) during plasma-assisted chemical vapour deposition of tin oxide (SnO2) thin films. The latter, composed of nanosized features, was...
The surface loss coefficients of CFx (x51 – 3) and F radicals have been measured on the stainless steel walls of the differential pumping systems of a plasma reactor. This measurement is made by comparing the beam to background signal ratio of the radicals measured by...
In discharge dentrification, radical production by electron collision with combustion gas is a key process which determines the dentrification process and its performance. In this study N, O, OH and H radical densities have been measured by appearance mass...
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