HALO 201 MBE
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A gas analysis system for molecular beam epitaxy applications
The Hiden HALO systems are designed for RGA, gas analysis and process monitoring applications including leak detection, trend analysis and vacuum survey.
Applications
The HALO 201 MBE is a high-sensitivity residual gas analyser (RGA) engineered for real-time vacuum diagnostics in molecular beam epitaxy (MBE) and ultra-high vacuum (UHV) systems. Designed to maintain gas purity and process control during thin film deposition, it offers precise gas composition monitoring, low detection limits, and stable long-term performance.
Optimised for integration with MBE chambers, the HALO 201 MBE provides accurate analysis of background gases and contaminants—supporting applications in semiconductor manufacturing, surface science, and advanced materials research. Compatible with MASsoft Professional software, it enables automated control, data logging, and leak detection workflows.
The system is supplied with MASsoft Professional software.
This Windows 10 and Windows 11 compatible software allows control of the instrument via USB 2.0, RS232 or Ethernet. Provides comprehensive I/O for data output and for reading data from external devices for integration and display with mass spectrometer data.
The iRGA software is a new and intuitive application for routine vacuum monitoring. It is designed to be simple and automatic.
- automatically provides partial pressure data for the common residual gas and vapours, including hydrogen, helium, water, nitrogen, oxygen, argon and a custom gas.
- includes a new tablet view where the background colour changes depending on alarm condition
- includes a trend view, scan, leak detection and maintenance modes
- includes alarm function to send alerts to internal I/O, Wi-Fi and by email
