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A gas analysis system for molecular beam epitaxy applications

The Hiden HALO systems are designed for RGA, gas analysis and process monitoring applications including leak detection, trend analysis and vacuum survey.


The MBE specific analyser is constructed from compatible materials and designed for prolonged use in MBE environments and includes, as standard, molybdenum wiring in place of copper and a contamination resistant ion source shroud.


Further Reading

The system is supplied with MASsoft Professional software.

This Windows 10 and Windows 11 compatible software allows control of the instrument via USB 2.0, RS232 or Ethernet. Provides comprehensive I/O for data output and for reading data from external devices for integration and display with mass spectrometer data.

The iRGA software is a new and intuitive application for routine vacuum monitoring. It is designed to be simple and automatic.

  • automatically provides partial pressure data for the common residual gas and vapours, including hydrogen, helium, water, nitrogen, oxygen, argon and a custom gas.
  • includes a new tablet view where the background colour changes depending on alarm condition
  • includes a trend view, scan, leak detection and maintenance modes
  • includes alarm function to send alerts to internal I/O, Wi-Fi and by email