Dr. Toyoda of Nagoya University has received an award for his paper “Mass spectroscopic measurement of time-varying ion composition in a pulse-modulated Ar/C4F8/O2 dual-frequency capacitively coupled plasma”.
In this work a Hiden EQP was used to measure the time-dependent ion composition in a pulse modulated Ar/C4F8/O2 dual-frequency capacitively coupled plasma. It was observed that Ar+ ions are dominant early in the pulse, whereas C2F4+ ions dominate later in the pulse. This difference was explained by an initial spike in the electron temperature leading to the preferential ionisation of Ar vs C2F4 due to differences in ionisation efficiency at differing electron temperatures.
Hiden Product: EQP Series
Paper: Shuichi Kuboi et al 2023 Jpn. J. Appl. Phys. 62 SI1003 DOI: 10.35848/1347-4065/acb6a1
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