For the determination of surface composition, contaminant analysis and for depth profiling

Hiden’s quadrupole mass spectrometers provide vacuum, plasma and surface analysis in nanotechnology applications.



Nanotechnology is research and technology development at the atomic, molecular or macromolecular levels, in the length scale of approximately 1 – 100 nanometre range, combined with creating and using structures, devices and systems that have novel properties and functions because of their small and/or intermediate size and with the ability to control or manipulate on the atomic scale.

Applications including :

  • SIMS depth profiling of nanometre scale thin film structures
  • Plasma characterisation for enhancement of device etch processes
  • Vacuum diagnostics / temperature programmed desorption analysers in UHV scanning tunnelling microscopes.