for Surface Analysis

Specialising in high-precision surface analysis solutions, Hiden Analytical offers class-leading mass spectrometers and turn-key systems for advanced surface science applications. Here you will find a comprehensive list of our mass spectrometry products for layer structure identification, surface contamination studies, and more.

If you cannot find a product suitable for your objectives, simply contact a member of the Hiden Analytical team today. We are one of the world’s foremost mass spectrometry suppliers for surface analysis applications and can readily provide tailored solutions for unique customer requirements.

Compact SIMS

A convenient solution for rapid surface composition analysis at the nanoscale

The Hiden Compact SIMS (secondary ion mass spectrometry) has a low form factor and simple, user-friendly layout, with outstanding isotopic sensitivity across the entire periodic table. See below for full specifications:
Mass range 50, 300, 510 amu
Minimum detectable concentration ppm
SIMS – Secondary Ion Mass Spectrometry Yes
Analysis of ions ejected from sample surface Yes positive ions (negative ion option)
SNMS – Secondary Neutral Mass Spectrometry Yes – Option
Depth resolution 3 nm
Minimum detectable concentration – Boron in Si 1017 atoms cm-3
Minimum detectable concentration – SNMS 1%
UHV multiport chamber No, fixed geometry easy entry chamber
Accommodates additional instrumentation No
Sample movement Manual

AutoSIMS

Fully-automated SIMS analysis for routine and repetitive tasks

A robust surface analysis solution for high throughput operations, the AutoSIMS can perform hundreds of processes a day without operator intervention. Browse a typical set of specifications below:
Mass range 50, 300, 510 amu
Minimum detectable concentration ppm
SIMS – Secondary Ion Mass Spectrometry Yes
Analysis of ions ejected from sample surface Yes positive ions (negative ion option)
SNMS – Secondary Neutral Mass Spectrometry Yes – Option
Depth resolution 3 nm
Minimum detectable concentration – Boron in Si 1017 atoms cm-3
Minimum detectable concentration – SNMS 1%
UHV multiport chamber No, fixed geometry easy entry chamber
Accommodates additional instrumentation No
Sample movement Automatic X, Y

SIMS/SNMS Workstation

A comprehensive solution for depth profiling and surface composition analysis

The SIMS Workstation combines dynamic and static SIMS analysis with a dual-mode mass spectrometer for positive (+ve) and negative (-ve) ion detection, and an additional secondary neutral mass spectrometry (SNMS) detection mode, for superior flexibility in surface analysis applications. Find full specifications below:
Mass range 300, 510 or 1000 amu
Minimum detectable concentration PPM/PPB level contamination analysis
SIMS – Secondary Ion Mass Spectrometry Yes
Analysis of ions ejected from sample surface Yes (primary ions of oxygen, argon or caesium)
SNMS – Secondary Neutral Mass Spectrometry Yes
Analysis of ions ejected from sample surface Yes (primary ions of oxygen, argon or caesium)
Depth resolution +/- 5 nanometer
Minimum detectable concentration – SIMS 1016 atoms per cubic centimeter – species dependent
Minimum detectable concentration – SNMS 0.01% – species dependant
UHV multiport chamber Yes
Accommodates additional instrumentation Yes (E.g. XPS)

EQS SIMS Analyser

A versatile ion detector for surface analysis and thin film engineering

With high transmission rates and an integrated 45° electrostatic sector energy analyser, the Hiden EQS (electrostatic quadrupole) is our most trusted SIMS detector for surface analysis applications of all scales. See the table below for detailed specifications:
Mass range 300, 510 or 1000 amu
Ion analysis Positive and negative ions
Ion energy analysis 100eV, 1000eV option,
Sensitivity > 106 counts/second per nanoamp for Aluminium
Residual gas analysis mode- RGA Leak detection and chamber vacuum analysis
SIMS – Secondary Ion Mass Spectrometry Yes
Analysis of ions ejected from sample surface Yes (primary ions of oxygen, argon or caesium)
FIB-SEM microscopy SIMS Yes
Fine-focus electron beam microscope compatible Yes (E.g. FIB-SEM – Zeiss Auriga 60)

MAXIM

Cutting-edge combined dynamic, static, and neutral SIMS analysis

The Hiden MAXIM is a complete quadrupole mass spectrometry system with high transmission optics and a triple mass filter, supporting detailed surface composition mapping at a mass range of up to 1000 atomic mass units (AMU). Find a set of typical specifications below:
Mass range 300, 510 or 1000 amu
Ion analysis Positive and negative ions
Ion energy analysis 100 eV
Sensitivity > 106 counts/second per nanoamp for Aluminium
SIMS – Secondary Ion Mass Spectrometry Yes
Analysis of ions ejected from sample surface Yes (primary ions of oxygen, argon or caesium)
SNMS – Secondary Neutral Mass Spectrometry Yes
Analysis of ions ejected from sample surface Yes (primary ions of oxygen, argon or caesium)
Residual gas analysis mode- RGA Leak detection and chamber vacuum analysis

IG5C

High performance with a small form factor

The Hiden IG5C is a low power (5keV) caesium ion gun that provides high brightness surface ionisation with a conveniently small mounting flange for superb installation flexibility. Refer to the table below for full performance information:
Primary ion Cs+
Ion energy 0.5 to 5.0 KeV
Minimum spot diameter 20 micrometers
Deflection field for mapping +/- 4 millimeters
Ion beam current 0.1 to 150 nA
Maximum Etch Rate 30 nm/min for a silicon target

IG20

An intense ion source for argon, oxygen, and inert gas capabilities

Designed primarily for oxygen compatibility, the Hiden IG20 is a high-performance electron impact ion source with a high current density for an intense spot of just 100 micrometres (µm) in diameter. Browse the table below for full specifications:
Primary ion Oxygen, Argon, Xenon
Ion energy 0.5 to 5 KeV
Minimum spot size (elemental mapping) 50 micrometers
Minimum spot size (depth profiling) 100 micrometers
Deflection field for mapping +/- 4 millimeters
Ion beam current 1.0 to 800 nanoamperes
Typical fast etch rate- Si (5 KeV Ar 600nA) 50 nanometers per second, 450um X 650um crater

Surface Analysis Solutions from Hiden Analytical

Hiden Analytical is a specialist mass spectrometer supplier for advanced surface analysis applications, from industrial-scale thin film engineering and contaminant identification to proprietary elemental mapping studies. Please contact us if you have any questions about the products on this page, or with any general queries.