HiPIMS

Deposition of highly crystalline AlScN thin films using synchronized high-power impulse magnetron sputtering: From combinatorial screening to piezoelectric devices 5.59 MB 1 downloads

Deposition of highly crystalline AlScN thin films using synchronized high-power impulse...

Low Temperature Deposition of Functional Thin Films on Insulating Substrates: Selective Ion Acceleration using Synchronized Floating Potential HiPIMS 2.36 MB 4 downloads

Low Temperature Deposition of Functional Thin Films on Insulating Substrates: Selective...

Tailoring the production of Nb superconducting films for SRF cavities: mass/energy spectroscopy and film characterisation 833.39 KB 4 downloads

Tailoring the production of Nb superconducting films for SRF cavities: mass/energy...

Comparison on the superconducting properties of Nb and NbTiN thin films produced by both HiPIMS and bipolar HiPIMS 985.15 KB 6 downloads

Comparison on the superconducting properties of Nb and NbTiN thin films produced...

Deposition of highly-crystalline AlScN thin films using synchronized HiPIMS – from combinatorial screening to piezoelectric devices 80.00 KB 0 downloads

Deposition of highly-crystalline AlScN thin films using synchronized HiPIMS – from...

Novel high-efficiency plasma nitriding process utilizing a high power impulse magnetron sputtering discharge 3.50 MB 12 downloads

Novel high-efficiency plasma nitriding process utilizing a high power impulse magnetron...

Deposition of ultrathick heavy-metal alloys on rotating substrates by high-power impulse magnetron sputtering: Target erosion effects 4.39 MB 16 downloads

Deposition of ultrathick heavy-metal alloys on rotating substrates by high-power...

Improving the crystallinity and texture of oblique-angle-deposited AlN thin films using reactive synchronized HiPIMS 10.49 MB 14 downloads

Improving the crystallinity and texture of oblique-angle-deposited AlN thin films...

Foundations of measurement of electrons, ions and species fluxes toward surfaces in low-temperature plasmas 3.00 MB 26 downloads

Foundations of measurement of electrons, ions and species fluxes toward surfaces...

Dense and hard TiWC protective coatings grown with tungsten ion irradiation using WC-HiPIMS/TiC-DCMS co-sputtering technique without external heating 4.12 MB 19 downloads

Dense and hard TiWC protective coatings grown with tungsten ion irradiation using...