HiPIMS

Energy distribution of negatively and positively charged ions in a magnetron sputtering discharge with a tungsten cathode and a positively biased anode in an argon/oxygen gas mixture. 2.14 MB 14 downloads

Energy distribution of negatively and positively charged ions in a magnetron sputtering...

Deposition of highly crystalline AlScN thin films using synchronized high-power impulse magnetron sputtering: From combinatorial screening to piezoelectric devices 5.59 MB 18 downloads

Deposition of highly crystalline AlScN thin films using synchronized high-power impulse...

Low Temperature Deposition of Functional Thin Films on Insulating Substrates: Selective Ion Acceleration using Synchronized Floating Potential HiPIMS 2.36 MB 19 downloads

Low Temperature Deposition of Functional Thin Films on Insulating Substrates: Selective...

Tailoring the production of Nb superconducting films for SRF cavities: mass/energy spectroscopy and film characterisation 833.39 KB 17 downloads

Tailoring the production of Nb superconducting films for SRF cavities: mass/energy...

Comparison on the superconducting properties of Nb and NbTiN thin films produced by both HiPIMS and bipolar HiPIMS 985.15 KB 19 downloads

Comparison on the superconducting properties of Nb and NbTiN thin films produced...

Deposition of highly-crystalline AlScN thin films using synchronized HiPIMS – from combinatorial screening to piezoelectric devices 80.00 KB 0 downloads

Deposition of highly-crystalline AlScN thin films using synchronized HiPIMS – from...

Novel high-efficiency plasma nitriding process utilizing a high power impulse magnetron sputtering discharge 3.50 MB 26 downloads

Novel high-efficiency plasma nitriding process utilizing a high power impulse magnetron...

Deposition of ultrathick heavy-metal alloys on rotating substrates by high-power impulse magnetron sputtering: Target erosion effects 4.39 MB 28 downloads

Deposition of ultrathick heavy-metal alloys on rotating substrates by high-power...

Improving the crystallinity and texture of oblique-angle-deposited AlN thin films using reactive synchronized HiPIMS 10.49 MB 26 downloads

Improving the crystallinity and texture of oblique-angle-deposited AlN thin films...

Foundations of measurement of electrons, ions and species fluxes toward surfaces in low-temperature plasmas 3.00 MB 39 downloads

Foundations of measurement of electrons, ions and species fluxes toward surfaces...