HiPIMS

Hybrid HiPIMS + Cathodic Arc Ion Energy Distribution Function Measurement with Carbon Target 2.38 MB 0 downloads

Hybrid HiPIMS + Cathodic Arc Ion Energy Distribution Function Measurement with Carbon...

Influence of plasma radial nonuniformities on the properties of RF magnetron sputtered indium tin oxide (ITO) films 1.77 MB 1 downloads

Influence of plasma radial nonuniformities on the properties of RF magnetron sputtered...

Reverse pulse strategies for silicon dioxide thin films deposition by high power impulse magnetron sputtering 5.39 MB 4 downloads

Reverse pulse strategies for silicon dioxide thin films deposition by high power...

Energy distribution of negatively and positively charged ions in a magnetron sputtering discharge with a tungsten cathode and a positively biased anode in an argon/oxygen gas mixture. 2.14 MB 17 downloads

Energy distribution of negatively and positively charged ions in a magnetron sputtering...

Deposition of highly crystalline AlScN thin films using synchronized high-power impulse magnetron sputtering: From combinatorial screening to piezoelectric devices 5.59 MB 21 downloads

Deposition of highly crystalline AlScN thin films using synchronized high-power impulse...

Low Temperature Deposition of Functional Thin Films on Insulating Substrates: Selective Ion Acceleration using Synchronized Floating Potential HiPIMS 2.36 MB 22 downloads

Low Temperature Deposition of Functional Thin Films on Insulating Substrates: Selective...

Tailoring the production of Nb superconducting films for SRF cavities: mass/energy spectroscopy and film characterisation 833.39 KB 20 downloads

Tailoring the production of Nb superconducting films for SRF cavities: mass/energy...

Comparison on the superconducting properties of Nb and NbTiN thin films produced by both HiPIMS and bipolar HiPIMS 985.15 KB 22 downloads

Comparison on the superconducting properties of Nb and NbTiN thin films produced...

Deposition of highly-crystalline AlScN thin films using synchronized HiPIMS – from combinatorial screening to piezoelectric devices 80.00 KB 0 downloads

Deposition of highly-crystalline AlScN thin films using synchronized HiPIMS – from...

Novel high-efficiency plasma nitriding process utilizing a high power impulse magnetron sputtering discharge 3.50 MB 29 downloads

Novel high-efficiency plasma nitriding process utilizing a high power impulse magnetron...