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HiPIMS

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Deposition of highly-crystalline AlScN thin films using synchronized HiPIMS – from combinatorial screening to piezoelectric devices 80.00 KB 0 downloads

Deposition of highly-crystalline AlScN thin films using synchronized HiPIMS – from...
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Novel high-efficiency plasma nitriding process utilizing a high power impulse magnetron sputtering discharge 3.50 MB 8 downloads

Novel high-efficiency plasma nitriding process utilizing a high power impulse magnetron...
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Deposition of ultrathick heavy-metal alloys on rotating substrates by high-power impulse magnetron sputtering: Target erosion effects 4.39 MB 12 downloads

Deposition of ultrathick heavy-metal alloys on rotating substrates by high-power...
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Improving the crystallinity and texture of oblique-angle-deposited AlN thin films using reactive synchronized HiPIMS 10.49 MB 12 downloads

Improving the crystallinity and texture of oblique-angle-deposited AlN thin films...
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Foundations of measurement of electrons, ions and species fluxes toward surfaces in low-temperature plasmas 3.00 MB 19 downloads

Foundations of measurement of electrons, ions and species fluxes toward surfaces...
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Dense and hard TiWC protective coatings grown with tungsten ion irradiation using WC-HiPIMS/TiC-DCMS co-sputtering technique without external heating 4.12 MB 16 downloads

Dense and hard TiWC protective coatings grown with tungsten ion irradiation using...
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Improving the crystallinity and texture of oblique-angle-deposited AlN thin films using reactive synchronized HiPIMS 4.30 MB 13 downloads

Improving the crystallinity and texture of oblique-angle-deposited AlN thin films...
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Ion energy analysis of a bipolar HiPIMS discharge using a retarding field energy analyser 1.20 MB 24 downloads

Ion energy analysis of a bipolar HiPIMS discharge using a retarding field energy...
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Microstructure and materials properties of understoichiometric TiBx thin films grown by HiPIMS 7.00 MB 19 downloads

Microstructure and materials properties of understoichiometric TiBx thin films...
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Time-averaged and time-resolved ion fluxes related to reactive HiPIMS deposition of Ti-Al-N films 56.00 KB 11 downloads

Time-averaged and time-resolved ion fluxes related to reactive HiPIMS deposition...