HiPIMS
Novel high-efficiency plasma nitriding process utilizing a high power impulse magnetron sputtering discharge 3.50 MB 5 downloads
Novel high-efficiency plasma nitriding process utilizing a high power impulse magnetron...
Deposition of ultrathick heavy-metal alloys on rotating substrates by high-power impulse magnetron sputtering: Target erosion effects 4.39 MB 9 downloads
Deposition of ultrathick heavy-metal alloys on rotating substrates by high-power...
Improving the crystallinity and texture of oblique-angle-deposited AlN thin films using reactive synchronized HiPIMS 10.49 MB 9 downloads
Improving the crystallinity and texture of oblique-angle-deposited AlN thin films...
Foundations of measurement of electrons, ions and species fluxes toward surfaces in low-temperature plasmas 3.00 MB 15 downloads
Foundations of measurement of electrons, ions and species fluxes toward surfaces...
Dense and hard TiWC protective coatings grown with tungsten ion irradiation using WC-HiPIMS/TiC-DCMS co-sputtering technique without external heating 4.12 MB 13 downloads
Dense and hard TiWC protective coatings grown with tungsten ion irradiation using...
Improving the crystallinity and texture of oblique-angle-deposited AlN thin films using reactive synchronized HiPIMS 4.30 MB 10 downloads
Improving the crystallinity and texture of oblique-angle-deposited AlN thin films...
Ion energy analysis of a bipolar HiPIMS discharge using a retarding field energy analyser 1.20 MB 20 downloads
Ion energy analysis of a bipolar HiPIMS discharge using a retarding field energy...
Microstructure and materials properties of understoichiometric TiBx thin films grown by HiPIMS 7.00 MB 16 downloads
Microstructure and materials properties of understoichiometric TiBx thin films...
Time-averaged and time-resolved ion fluxes related to reactive HiPIMS deposition of Ti-Al-N films 56.00 KB 7 downloads
Time-averaged and time-resolved ion fluxes related to reactive HiPIMS deposition...
