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HiPIMS

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Ion energy analysis of a bipolar HiPIMS discharge using a retarding field energy analyser 1.20 MB 0 downloads

Ion energy analysis of a bipolar HiPIMS discharge using a retarding field energy...
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Microstructure and materials properties of understoichiometric TiBx thin films grown by HiPIMS 7.00 MB 1 downloads

Microstructure and materials properties of understoichiometric TiBx thin films...
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Time-averaged and time-resolved ion fluxes related to reactive HiPIMS deposition of Ti-Al-N films 56.00 KB 0 downloads

Time-averaged and time-resolved ion fluxes related to reactive HiPIMS deposition...
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Reactive HiPIMS deposition of Al-oxide thin films using W-alloyed Al targets 27.90 MB 1 downloads

Reactive HiPIMS deposition of Al-oxide thin films using W-alloyed Al targets ...