Plasma Langmuir Probe

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Inductively coupled Cl2/Ar plasma: Experimental investigation and modeling. 152.30 KB

Inductively coupled Cl2/Ar plasma: Experimental investigation and modeling. ...
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Etching characteristics and mechanisms of the MgO thin films in the CF4/Ar inductively coupled plasma. 243.92 KB

Etching characteristics and mechanisms of the MgO thin films in the CF4/Ar inductively...
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Etching characteristics and mechanism of Au thin films in inductively coupled Cl2/Ar plasma. 93.31 KB

Etching characteristics and mechanism of Au thin films in inductively coupled Cl2/Ar...
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Effect of the Gas Mixing Ratio on the Plasma Parameters and the Gas Phase Composition in Cl2/CF4 Inductively Coupled Plasmas. 1.27 MB

Effect of the Gas Mixing Ratio on the Plasma Parameters and the Gas Phase Composition...
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Effect of Backpressure on Ion Current Density Measurements in Hall Thruster Plumes. 1.85 MB

Effect of Backpressure on Ion Current Density Measurements in Hall Thruster Plumes. ...
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Applicability of self-consistent global model for characterization of inductively coupled Cl2 plasma. 235.93 KB

Applicability of self-consistent global model for characterization of inductively...