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Plasma Langmuir Probe

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Selective Etching of (Ba,Sr)TiO3 Thin Films Over Silicon 794.01 KB 33 downloads

Selective etching of (Ba,Sr)TiO3 thin films over silicon in an inductively coupled...
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Plasma Characteristics in Pulse-Mode Plasmas using Time-Delayed, Time-Resolved Langmuir... 1.14 MB 41 downloads

Plasma characteristics in pulse-mode plasmas using time-delayed, time-resolved Langmuir...
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Observations of the long-term plasma evolution in a pulsed dc magnetron discharge. 694.99 KB 30 downloads

Observations of the long-term plasma evolution in a pulsed dc magnetron discharge. ...
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Langmuir probe measurements in an inductively coupled plasma source. 199.29 KB 43 downloads

Langmuir probe measurements in an inductively coupled plasma source. ...
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Ion energy distribution functions and Langmuir probe measurements in low pressure argon discharges. 128.80 KB 50 downloads

Ion energy distribution functions and Langmuir probe measurements in low pressure...
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Investigation of SrBi2Ta2O9 thin films etching mechanisms in Cl2/Ar plasma. 104.93 KB 28 downloads

Investigation of SrBi2Ta2O9 thin films etching mechanisms in Cl2/Ar plasma. ...
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Inductively coupled Cl2/Ar plasma: Experimental investigation and modeling. 152.30 KB 23 downloads

Inductively coupled Cl2/Ar plasma: Experimental investigation and modeling. ...
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Etching characteristics and mechanisms of the MgO thin films in the CF4/Ar inductively coupled plasma. 243.92 KB 19 downloads

Etching characteristics and mechanisms of the MgO thin films in the CF4/Ar inductively...
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Etching characteristics and mechanism of Au thin films in inductively coupled Cl2/Ar plasma. 93.31 KB 17 downloads

Etching characteristics and mechanism of Au thin films in inductively coupled Cl2/Ar...
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Effect of the Gas Mixing Ratio on the Plasma Parameters and the Gas Phase Composition in Cl2/CF4 Inductively Coupled Plasmas. 1.27 MB 24 downloads

Effect of the Gas Mixing Ratio on the Plasma Parameters and the Gas Phase Composition...