Plasma Characterisation

Hiden EQP and PSM mass/energy analysers are offered with a range of standard sampling options to provide for plasma characterisation in a broad range of applications including :

ECR – Electron Cyclic Resonance

Electron Cyclotron Resonance plasma is used for chemical vapour deposition, CVD and etching in semiconductor processing. Magnetic shielding of the EQP and PSM Mass/Energy Analyser enables operation in the high magnetic field environment produced by the ECR plasma source. EQP Mass and energy analyser for plasma diagnostics PSM Series Advanced Plasma Sampling Mass Spectrometers

Magnetron Sputtering

Magnetron sputtering is for plasma vapour deposition and is available in DC and RF forms producing a range of thin films used in many industries including decorative coatings, hard disk drive platters , optoelectronics and solar cells.

High Power Impulse Magnetron Sputtering (HIPIMS)

Pulsed plasma provide high density plasma for adhesion enhancing pre-treatment of the substrate prior to coating deposition (substrate etching) and deposition of thin films with high microstructure density. Hiden’s data acquisition system provides for time resolved data acquisition across the plasma pulse providing mass resolved ion energy information for positive and negative ions.

Inductively Coupled Plasma (ICP) and RF Plasma

ICP and RF plasma are used for many applications including reactive ion etching of thin films. Hiden’s advanced Langmuir probe system, ESPion includes RF compensation circuits to enable operation and data collection from within the plasma RF environment. ESPion Advanced langmuir probe for plasma diagnostics.

Dielectric Barrier Discharge (DBD)

DBD plasma sources are widely used for surface modification at atmospheric plasma. Hiden’s HPR-60 molecular beam sampling system provides for mass and enrgy analysis of plasma ions, neutra

Hiden EQP Mass/Energy Analyser for Plasma Diagnostics and Characterisation (Introduction)

Hiden EQP Applications Mass/Energy Analyser for Plasma Diagnostics and Characterisation

Hiden ESPion Advanced Langmuir Probe for Plasma Diagnostics & Characterisation

Hiden HPR-60 Molecular Beam Mass Spectrometer (MBMS) for the quantitative analysis of reactive gas species (Introduction)

Hiden HPR-60 Molecular Beam Mass Spectrometer (MBMS) for the quantitative analysis of reactive gas species (Applications).

Signal Gating and MCS

Operando Investigation of Intermediate Species in Non-Oxidative Methane Coupling by Non-thermal RF Plasma

Atmospheric Plasma Analysis by Molecular Beam MS – GEC 2004 (1.38 MB)

Atmospheric Pressure Plasma Analysis by Modulated Molecular Beam MS – ICPIG 2005 (256 KB)

Ion Energy Distributions for a DC Plasma – GEC 2003 (250 KB)

Mass Analysis of CF3I Decomposition in a Surface Barrier Discharge – GEC 2011 (2.8 MB)

Mass Spectroscopy of Metastable Species during Plasma Processing – GEC 2011 (2.1 MB)

Time Resolved Ionisation Studies of HIPIMS – PSE 2006 (848 KB)