Plasma Etching

Etch characteristics of maskless Oxide/Nitride/Oxide/Nitride (ONON) stacked structure using C4H2F6-based gas 981.04 KB 5 downloads

Etch characteristics of maskless Oxide/Nitride/Oxide/Nitride (ONON) stacked structure...

Surface sulfurization of amorphous carbon films in the chemistry of oxygen plasma added with SO2 or OCS for high-aspect-ratio etching 2.90 MB 0 downloads

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Database Development of SiO2 Etching with Fluorocarbon Plasmas Diluted with Various Noble Gases of Ar, Kr, and Xe 3.64 MB 18 downloads

Database Development of SiO2 Etching with Fluorocarbon Plasmas Diluted with Various...

Selective Etching of (Ba,Sr)TiO3 Thin Films Over Silicon in an Inductively Coupled Plasma 794.01 KB 50 downloads

Selective etching of (Ba,Sr)TiO3 thin films over silicon in an inductively coupled...

Quantitative Control of Etching Reactions on Various SiOCH Materials 785.61 KB 48 downloads

Quantitative control of etching reactions on various SiOCH materials. ...

Plasma Etching Selectivity of ZrO2 to Si in BCl3/Cl2 Plasmas 199.41 KB 91 downloads

Plasma etching selectivity of ZrO2 to Si in BCl3/Cl2 plasmas. ...

Plasma Etching of High Dielectric Constant Materials on Silicon in Halogen Chemistries 141.61 KB 59 downloads

Plasma etching of high dielectric constant materials on silicon in halogen chemistries. ...

Measurements of Neutral and Ion Composition, Neutral Temperature, and Electron Energy... 725.56 KB 43 downloads

Measurements of neutral and ion composition, neutral temperature, and electron energy...

Magnetized inductively coupled plasma etching of GaN in Cl2/BCl3 plasmas. 180.34 KB 46 downloads

Mass spectrometry studies of resist trimming processes in HBr/O2 and Cl2/O2chemistries. ...

Magnetized Inductively Coupled Plasma Etching of GaN in Cl2/BCl3 Plasmas 201.40 KB 48 downloads

Magnetized inductively coupled plasma etching of GaN in Cl2/BCl3 plasmas. ...