Plasma Etching
Formation of SCF+SCF2 and CS2 + ions during gas modulation cycles associated with interference between alternating C4F8 and SF6 in Ar plasma 866.98 KB 3 downloads
Formation of SCF+SCF2 and CS2 + ions during gas modulation cycles associated with...Etch characteristics of maskless Oxide/Nitride/Oxide/Nitride (ONON) stacked structure using C4H2F6-based gas 981.04 KB 15 downloads
Etch characteristics of maskless Oxide/Nitride/Oxide/Nitride (ONON) stacked structure...Surface sulfurization of amorphous carbon films in the chemistry of oxygen plasma added with SO2 or OCS for high-aspect-ratio etching 2.90 MB 0 downloads
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Database Development of SiO2 Etching with Fluorocarbon Plasmas Diluted with Various Noble Gases of Ar, Kr, and Xe 3.64 MB 27 downloads
Database Development of SiO2 Etching with Fluorocarbon Plasmas Diluted with Various...Selective Etching of (Ba,Sr)TiO3 Thin Films Over Silicon in an Inductively Coupled Plasma 794.01 KB 60 downloads
Selective etching of (Ba,Sr)TiO3 thin films over silicon in an inductively coupled...Quantitative Control of Etching Reactions on Various SiOCH Materials 785.61 KB 59 downloads
Quantitative control of etching reactions on various SiOCH materials. ...Plasma Etching Selectivity of ZrO2 to Si in BCl3/Cl2 Plasmas 199.41 KB 102 downloads
Plasma etching selectivity of ZrO2 to Si in BCl3/Cl2 plasmas. ...Plasma Etching of High Dielectric Constant Materials on Silicon in Halogen Chemistries 141.61 KB 70 downloads
Plasma etching of high dielectric constant materials on silicon in halogen chemistries. ...Measurements of Neutral and Ion Composition, Neutral Temperature, and Electron Energy... 725.56 KB 53 downloads
Measurements of neutral and ion composition, neutral temperature, and electron energy...