Electronic materials
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Ion implantation and diffusion is used to deliver dopants into semiconductors, SIMS accurately measures the dopant concentration for process development and monitoring.
The examples below show quantified depth profiles in silicon substrates
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How to Analyse the Top Nano Layers of a Material
Low-frequency plasma activation of nylon 6 2.63 MB 39 downloads
Low-frequency plasma activation of nylon 6 ...
Wafer-level uniformity of atomic-layer-deposited niobium nitride thin films for quantum devices 1.92 MB 28 downloads
Wafer-level uniformity of atomic-layer-deposited niobium nitride thin films for...
ZnS nanoparticle decorated ZnO nanowall network: investigation through electron microscopy and secondary ion mass spectrometry 48.00 KB 0 downloads
ZnS nanoparticle decorated ZnO nanowall network: investigation through electron microscopy...
Towards x-ray waveguide formation upon ion irradiation of a Co thin film on Si(111) 48.00 KB 0 downloads
Towards x-ray waveguide formation upon ion irradiation of a Co thin film on Si(111) ...
Symmetric and asymmetric collision effects on the formation of singly and doubly-charged ions in sputtering process 48.00 KB 0 downloads
Symmetric and asymmetric collision effects on the formation of singly and doubly-charged...
Structure, Electronic Structure, Optical, and Dehydrogenation Catalytic Study of (Zn1-zInz)(O1-xNx) Solid Solution 48.00 KB 0 downloads
Structure, Electronic Structure, Optical, and Dehydrogenation Catalytic Study of...
Secondary ion mass spectrometry and photoluminescence study on microstructural characteristics of chemically synthesized ZnO nanowalls 48.00 KB 0 downloads
Secondary ion mass spectrometry and photoluminescence study on microstructural characteristics...
Modified photoluminescence and photodetection characteristics of chemically grown SnO coated ZnO nanoneedles 48.00 KB 0 downloads
Modified photoluminescence and photodetection characteristics of chemically grown...
MCsn +-SIMS: an innovative approach for direct compositional analysis of materials without standards 48.00 KB 0 downloads
MCsn +-SIMS: an innovative approach for direct compositional analysis of materials...
