Electronic materials
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Ion implantation and diffusion is used to deliver dopants into semiconductors, SIMS accurately measures the dopant concentration for process development and monitoring.
The examples below show quantified depth profiles in silicon substrates
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How to Analyse the Top Nano Layers of a Material
Interface-Dominated Growth of a Metastable Novel Alloy Phase 1.94 MB 41 downloads
Interface-dominated Growth of a Metastable Novel Alloy Phase. ...
Instantaneous Surface Work Function Dependence of MCs+n Molecular Ion Emission Under... 1.94 MB 37 downloads
Instantaneous surface work function dependence of MCs+n molecular ion emission under...
Optimisation of the connection between TA-MS systems together with improved data interpretation for TA-MS applications. 1.98 MB 42 downloads
Optimisation of the connection between TA-MS systems together with improved data...
High-temperature oxidation of CrN/AlN multilayer coatings. 605.40 KB 32 downloads
High-temperature oxidation of CrN/AlN multilayer coatings. ...
Formation of a tetragonal Cu3Au alloy at gold/copper interfaces. 1.94 MB 32 downloads
Formation of a tetragonal Cu3Au alloy at gold/copper interfaces. ...
Evidence of multiple H+ ion desorption pathways with ESD of chemisorbed and multilayer water. 2.35 MB 37 downloads
Evidence of multiple H+ ion desorption pathways with ESD of chemisorbed and multilayer...
Energy distributions of Ga+ and In+ secondary ions sputtered from AIIIBV compound semiconductors by noble gas ions: Mass-dependence of the high-energy yield on the second component (P, As, Sb) of the compounds. 133.85 KB 31 downloads
Energy distributions of Ga+ and In+ secondary ions sputtered from AIIIBV compound...
Energetics of MCsn+ molecular ions emitted from Cs+ irradiated surfaces. 207.58 KB 37 downloads
Energetics of MCsn+ molecular ions emitted from Cs+ irradiated surfaces. ...
End point detection in ion beam milling of YB2 Cu3 07 thin films. 4.15 MB 36 downloads
End point detection in ion beam milling of YB2 Cu3 07 thin films. ...
