Electronic materials
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Ion implantation and diffusion is used to deliver dopants into semiconductors, SIMS accurately measures the dopant concentration for process development and monitoring.
The examples below show quantified depth profiles in silicon substrates
Related Products
SIMS Workstation
FIB – SIMS | Focussed Ion Beam Secondary Ion Mass Spectrometry
Hiden Compact SIMS Mass Spectrometry in solid material
Hiden SIMS | Analytical Secondary Ion Mass Spectrometry Products
Low Energy Ne Scattering from Metal Surfaces using MARISS
High Five: UHV SIMS with Plasma Primary & Simultaneous Positive and Negative Secondary Ion Detection
What is SIMS Surface Analysis?
Contaminant Analysis with Hiden Surface Analyzers
What is Surface Interface Analysis?
Mass Spectrometers for Silicon Semiconductor Analysis
Surface Analysis Products from Hiden Analytical
How to Analyse the Top Nano Layers of a Material
Silicon-doped β-Ga2O3 films grown at 1 μm/h by suboxide molecular-beam epitaxy 1.33 MB 18 downloads
Silicon-doped β-Ga2O3 films grown at 1 μm/h by suboxide molecular-beam epitaxy ...
Interaction of molecular oxygen ions with copper surface: features of the energy spectra of sputtered and backscattered ions 511.39 KB 14 downloads
Interaction of molecular oxygen ions with copper surface: features of the energy...
P-type conductivity in Sn-doped Sb2 Se3 2.64 MB 15 downloads
P-type conductivity in Sn-doped Sb2 Se3 ...
Controlling Li Dendritic Growth in Graphite Anodes by Potassium Electrolyte Additives for Li-Ion Batteries 3.75 MB 28 downloads
Controlling Li Dendritic Growth in Graphite Anodes by Potassium Electrolyte Additives...
Robust nonfullerene solar cells approaching unity external quantum efficiency enabled by suppression of geminate recombination 1.05 MB 21 downloads
Robust nonfullerene solar cells approaching unity external quantum efficiency...
Mitigating Structural Instability of High-Energy Lithium- and Manganese-Rich LiNixMnyCoz Oxide by Interfacial Atomic Surface Reduction 4.22 MB 22 downloads
Mitigating Structural Instability of High-Energy Lithium- and Manganese-Rich LiNixMnyCoz...
Towards x-ray waveguide formation upon ion irradiation of a Co thin film on Si(111) 1,011.83 KB 21 downloads
Towards x-ray waveguide formation upon ion irradiation of a Co thin film on Si(111) ...
Analysis of useful ion yield for the Mg dopant in GaN by quadrupole—SIMS 1.03 MB 26 downloads
Analysis of useful ion yield for the Mg dopant in GaN by quadrupole—SIMS ...
Large area visualization of the Li distribution in lithium-ion battery electrodes using plasma FIB and SIMS 384.40 KB 20 downloads
Large area visualization of the Li distribution in lithium-ion battery electrodes...
