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Electronic materials

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Ion implantation and diffusion is used to deliver dopants into semiconductors, SIMS accurately measures the dopant concentration for process development and monitoring.

The examples below show quantified depth profiles in silicon substrates

Overview

Ion implantation and diffusion is used to deliver dopants into semiconductors, SIMS accurately measures the dopant
concentration for process development and monitoring.

The examples below show quantified depth profiles in silicon substrates.

Further Reading

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Application of Secondary Ion Mass Spectrometry for Analysis of Decorative Coatings on Fancy Goods Accessories 1.33 MB 30 downloads

Application of Secondary Ion Mass Spectrometry for Analysis of Decorative Coatings...
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Alkali-metal-based molecular-ion secondary ion mass spectrometry for precise quantitative analysis of low-dimensional materials without standards 3.01 MB 45 downloads

Alkali-metal-based molecular-ion secondary ion mass spectrometry for precise quantitative...
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The crucial role of defect structure in understanding the electrical properties of spark plasma sintered antimony doped barium stannate 1.74 MB 66 downloads

The crucial role of defect structure in understanding the electrical properties of...
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Silicon-doped β-Ga2O3 films grown at 1 μm/h by suboxide molecular-beam epitaxy 1.33 MB 83 downloads

Silicon-doped β-Ga2O3 films grown at 1 μm/h by suboxide molecular-beam epitaxy ...
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Interaction of molecular oxygen ions with copper surface: features of the energy spectra of sputtered and backscattered ions 511.39 KB 84 downloads

Interaction of molecular oxygen ions with copper surface: features of the energy...
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P-type conductivity in Sn-doped Sb2 Se3 2.64 MB 80 downloads

P-type conductivity in Sn-doped Sb2 Se3 ...
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Controlling Li Dendritic Growth in Graphite Anodes by Potassium Electrolyte Additives for Li-Ion Batteries 3.75 MB 117 downloads

Controlling Li Dendritic Growth in Graphite Anodes by Potassium Electrolyte Additives...
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Robust nonfullerene solar cells approaching unity external quantum efficiency enabled by suppression of geminate recombination 1.05 MB 88 downloads

Robust nonfullerene solar cells approaching unity external quantum efficiency...
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Mitigating Structural Instability of High-Energy Lithium- and Manganese-Rich LiNixMnyCoz Oxide by Interfacial Atomic Surface Reduction 4.22 MB 90 downloads

Mitigating Structural Instability of High-Energy Lithium- and Manganese-Rich LiNixMnyCoz...
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Towards x-ray waveguide formation upon ion irradiation of a Co thin film on Si(111) 1,011.83 KB 89 downloads

Towards x-ray waveguide formation upon ion irradiation of a Co thin film on Si(111) ...